Low Specific Contact Resistivity Titanium Silicides on n+ and p+ Silicon by Sputter Deposition of Ti/Si Multilayers and Annealing
Revva, P.Volume:
144
Year:
1997
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1838138
File:
PDF, 1.01 MB
english, 1997