XPS Study of H-Terminated Silicon Surface under Inert Gas...

Journal of The Electrochemical Society 2005 Vol. 152; Iss. 2

XPS Study of H-Terminated Silicon Surface under Inert Gas and UHV Annealing

Kawase, Kazumasa, Tanimura, Junji, Kurokawa, Hiroshi, Wakao, Kazutoshi, Inoue, Masao, Umeda, Hiroshi, Teramoto, Akinobu
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Volume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1851032
File:
PDF, 354 KB
english, 2005
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