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Electrical Properties in High-k HfO[sub 2] Capacitors with an Equivalent Oxide Thickness of 9 Å on Ru Metal Electrode
Kim, Jeon-Ho, Yoon, Soon-Gil, Yeom, Seung-Jin, Woo, Hyun-Kyung, Kil, Deok-Sin, Roh, Jae-Sung, Sohn, Hyun-ChulVolume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1895285
File:
PDF, 72 KB
english, 2005