Effect of Plasma on Characteristics of Zirconium Oxide...

Electrochemical and Solid-State Letters 2005 Vol. 8; Iss. 11

Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition

Yun, Sun Jin, Lim, Jung Wook, Lee, Jin Ho
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Volume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2039952
File:
PDF, 159 KB
english, 2005
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