Physical and Electrical Characteristics of Thin Silicon Nitride Dielectric Films Deposited on Smooth and Rugged Polycrystalline Silicon after Rapid Thermal Nitridation
Mathews, Viju K.Volume:
141
Year:
1994
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2054842
File:
PDF, 598 KB
english, 1994