Physical and Electrical Characteristics of Thin Silicon...

Physical and Electrical Characteristics of Thin Silicon Nitride Dielectric Films Deposited on Smooth and Rugged Polycrystalline Silicon after Rapid Thermal Nitridation

Mathews, Viju K.
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Volume:
141
Year:
1994
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2054842
File:
PDF, 598 KB
english, 1994
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