Polysilicon Resistor Modification with Hydrogen Plasmas on...

Polysilicon Resistor Modification with Hydrogen Plasmas on Fabricated Integrated Circuits

Ginley, D. S.
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Volume:
134
Year:
1987
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2100824
File:
PDF, 332 KB
english, 1987
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