Extending the Flash Heating Removal Rate Model to Various...

Extending the Flash Heating Removal Rate Model to Various Interlayer Dielectric CMP Consumables

Sorooshian, Jamshid, Philipossian, Ara
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Volume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2109607
File:
PDF, 337 KB
english, 2005
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