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Reduction of Sodium Ion Density in Molybdenum-Gate MOS Devices with the Addition of Tantalum to Gate Electrodes
Ohfuji, Shin-ichiVolume:
132
Year:
1985
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2114192
File:
PDF, 606 KB
english, 1985