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Effects of CMP Slurry Chemistry on the Zeta Potential of Alumina Abrasives
Gopal, Tanuja, Talbot, Jan B.Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2198128
File:
PDF, 318 KB
english, 2006