Effects of NH[sub 3] Plasma Pretreatment before...

Effects of NH[sub 3] Plasma Pretreatment before Crystallization on Low-Temperature-Processed Poly-Si Thin-Film Transistors

Fan, Ching-Lin, Yang, Tsung-Hsien
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Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2207000
File:
PDF, 179 KB
english, 2006
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