Effects of NH[sub 3] Plasma Pretreatment before Crystallization on Low-Temperature-Processed Poly-Si Thin-Film Transistors
Fan, Ching-Lin, Yang, Tsung-HsienVolume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2207000
File:
PDF, 179 KB
english, 2006