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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Modeling and Optimization of Internal Gettering of Iron in Silicon
Haarahiltunen, Antti, Väinölä, Hele, Yli-Koski, Marko, Sinkkonen, Juha, Anttila, OlliVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2355763
File:
PDF, 433 KB
english, 2006