[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Control of Material Interactions in Advanced High-k Metal Gate Stacks
Wajda, Cory, Leusink, Gert, Akiyama, Koji, Ashigaki, Shigeo, Aoyama, Shintaro, Shimomura, Kouji, Aruga, Miki, Takahashi, Tsuyoshi, Yamazaki, Kazuyoshi, Yamasaki, HideakiVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2356277
File:
PDF, 312 KB
english, 2006