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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Evolution of Lattice Strain in Hydrogen-Implanted Silicon Prior to Layer Splitting: An X-Ray Scattering Study
Capello, Luciana, Rieutord, Francois, Tauzin, Aurelie, Mazen, Frederic, Sousbie, Nicolas, Letertre, FabriceVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2357061
File:
PDF, 357 KB
english, 2006