Work Function Shift Mechanism of Metal-Gate Electrode with Ru∕Ti Bilayer
Park, In-Sung, Ko, Han-Kyoung, Lee, Taeho, Park, Jungho, Choi, Duck-Kyun, Ahn, Jinho, Park, Min-Ho, Yang, Cheol-WoongVolume:
10
Year:
2007
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2402980
File:
PDF, 110 KB
english, 2007