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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Atomic Layer Deposition for Nano-Fabrication of 3D Optoelectronic Devices
Graugnard, Elton, King, Jeffrey S., Gaillot, Davy P., Summers, Christopher J.Volume:
3
Year:
2007
Language:
english
DOI:
10.1149/1.2721488
File:
PDF, 1.41 MB
english, 2007