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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Particle Removal from Micrometer-Sized Trenches Using High-Velocity-Aerosol Cleaning and Comparison with Megasonic Tank Cleaning
Wostyn, Kurt L., Sano, Ken-Ichi, Eitoku, Atsuro, Janssens, Tom, Bearda, Twan, Leunissen, Leonardus H.A., Mertens, P.Volume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779362
File:
PDF, 144 KB
english, 2007