[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Modifications of Porous Low-k by Plasma Treatments and Wet Cleans
Xu, Kaidong, Vereecke, Guy, Kesters, Els, Le, QuocToan, Lux, Marcel, Henry, Sally-Ann, Kraus, Harald, Archer, Leo, Mertens, P., Kovacs, Frederic, Dalmer, Michael, Gaulhofer, Ernst, Luo, Shijian, Han,Volume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779405
File:
PDF, 289 KB
english, 2007