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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Materials and Process Integration Issues in Metal Gate/High-k Stacks and Their Dependence on Device Performance
Callegari, Alessandro, Babich, Katherina, Zafar, Sufi, Narayanan, Vijay, Ando, Takashi, Batson, Philip E.Volume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779566
File:
PDF, 362 KB
english, 2007