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Liquid Injection ALD of Pb(Zr,Ti)O[sub x] Thin Films by a Combination of Self-Regulating Component Oxide Processes
Watanabe, Takayuki, Hoffmann-Eifert, Susanne, Peter, Frank, Mi, Shaobo, Jia, Chunlin, Hwang, Cheol Seong, Waser, RainerVolume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2789295
File:
PDF, 1.48 MB
english, 2007