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[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Advanced Metrology for Porous Low-k Integration into Cu back-end Processes
Ryan, Paul A., Bytheway, Richard, Gibson, Gary, Koga, KazuhiroVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2790403
File:
PDF, 817 KB
english, 2007