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[ECS 21st Symposium on Microelectronics Technology and Devices - Ouro Preto - MG - Brazil (August 28-September 1, 2006)] ECS Transactions - Young's Modulus of a-SiC:H Determined by the Resonant Frequency of Thermally Driven Cantilevers
Rehder, G., Carreño, M. N.Volume:
4
Year:
2007
Language:
english
DOI:
10.1149/1.2813485
File:
PDF, 676 KB
english, 2007