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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Ion Implantation: A Method of Producing Low-k Silicon Oxide-based Materials
Leoni, Elisa, De Sousa Meneses, Domingos, Ntsoenzok, Esidor, Canino, Mariaconcetta, Regula, GabrielleVolume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2908653
File:
PDF, 53 KB
english, 2008