[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23,...

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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Characterization of Process Induced Surface Profiles and Lattice Strains using Optical Surface Profilometry and Multi-wavelength Raman Spectroscopy

Yoo, Woo Sik, Ueda, Takeshi, Kajiwara, Junya, Ishigaki, Toshikazu, Kang, Kitaek
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Volume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2911518
File:
PDF, 841 KB
english, 2008
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