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[ECS 23rd Symposium on Microelectronics Technology and Devices - Gramado, Brazil (September 1 - September 4, 2008)] ECS Transactions - Etching Characteristics and Surface Morphology of Nitrogen-Doped a-SiC Films Prepared by RF Magnetron Sputtering
Fraga, Mariana A., Pessoa, Rodrigo S., Oliveira, Ivo C., Massi, Marcos, Maciel, Homero S., Martinho, Herculano, Dos Santos Filho, Sebastião G., Marcuzzo, Jossano S.Volume:
14
Year:
2008
Language:
english
DOI:
10.1149/1.2956052
File:
PDF, 578 KB
english, 2008