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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Fixed-Oxide-Charge Characterization by Photoreflec-tance Spectroscopy in HfO
Kanashima, Takeshi, Lee, Hyun, Mori, Yuya, Imajo, Hideto, Okuyama, MasanoriVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2986826
File:
PDF, 641 KB
english, 2008