The Importance of Moisture Control for EOT Scaling of Hf-Based Dielectrics
Ragnarsson, Lars-Åke, Brunco, David P., Yamamoto, Kazuhiko, Tökei, Zsolt, Pourtois, Geoffrey, Delabie, Annelies, Parmentier, Brigitte, Conard, Thierry, Roussel, Philippe, De Gendt, Stefan, Heyns, MaVolume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3097193
File:
PDF, 532 KB
english, 2009