[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - PECVD Bi-Layer ARC for BARC-less Immersion Lithography
Tang, Betty, Seamons, Martin, Lin, Michael, Dai, Huixiong, Ramirez, RicardoYear:
2009
Language:
english
DOI:
10.1149/1.3122131
File:
PDF, 508 KB
english, 2009