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Pulsed CVD-W Nucleation Layer Using WF[sub 6] and B[sub 2]H[sub 6] for Low Resistivity W
Kim, Choon-Hwan, Rho, Il-Cheol, Kim, Soo-Hyun, Han, Il-Keoun, Kang, Hyo-Sang, Ryu, Seung-Wook, Kim, Hyeong-JoonVolume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3155430
File:
PDF, 636 KB
english, 2009