[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - MOCVD Of Gallium Oxide Thin Films Using Homoleptic Gallium Complexes: Precursor Evaluation and Thin Film Characterisation
Hellwig, Malte, Xu, Ke, Barreca, Davide, Gasparotto, Alberto, Niermann, Benedikt, Winter, Jörg, Becker, Hans-Werner, Rogalla, Detlev, Fischer, Roland, Devi, AnjanaYear:
2009
Language:
english
DOI:
10.1149/1.3207648
File:
PDF, 717 KB
english, 2009