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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Shape Optimization of a Showerhead System for the Control of Growth Uniformity in a MOCVD Reactor Using CFD-based Evolutionary Algorithms
Xenidou, Theodora C., Prud'Homme, Nathalie, Aloui, Lyacine, Vahlas, Constantin, Markatos, Nicholas C., Boudouvis, Andreas G.Year:
2009
Language:
english
DOI:
10.1149/1.3207705
File:
PDF, 717 KB
english, 2009