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Nanoscale Defect Generation in CMP of Low-k/Copper Interconnect Patterns
Choi, Joo Hoon, Korach, Chad S.Volume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3243852
File:
PDF, 554 KB
english, 2009