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Effect of UV-Assisted RTA on the Electrical Properties of (Ba,Sr)TiO[sub 3] Films for Low Temperature Embedding of Decoupling Capacitor
Cho, Kwang-Hwan, Kang, Min-Gyu, Kang, Chong-Yun, Yoon, Seok-Jin, Lee, YoungPak, Kim, Jong-Hee, Cho, Bong-HeeVolume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3243858
File:
PDF, 423 KB
english, 2009