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Study of the Surface Reactions in ALD Hafnium Aluminates
Nyns, L., Delabie, A., Pourtois, G., Van Elshocht, S., Vinckier, C., De Gendt, S.Volume:
157
Year:
2010
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3246802
File:
PDF, 273 KB
english, 2010