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Effect of CF[sub 4] Plasma on Properties and Reliability of Metal-Induced Lateral Crystallization Silicon Transistors
Chang, Chih-Pang, Wu, YewChung SermonVolume:
157
Year:
2010
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3265989
File:
PDF, 259 KB
english, 2010