Low Temperature Annealing with Solid-State Laser or UV Lamp Irradiation on Amorphous IGZO Thin-Film Transistors
Zan, Hsiao-Wen, Chen, Wei-Tsung, Chou, Cheng-Wei, Tsai, Chuang-Chuang, Huang, Ching-Neng, Hsueh, Hsiu-WenVolume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3313201
File:
PDF, 233 KB
english, 2010