ECS Transactions [ECS China Semiconductor Technology...

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ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - Synchronous Pulsed Plasma for Silicon Etch Applications

Darnon, Maxime, Petit-Etienne, Camille, Pargon, Erwine, Cunge, Gilles, Vallier, Laurent, Bodart, Paul, Haas, Moritz, Banna, Samer, Lill, Thorsten, Joubert, Olivier
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Year:
2010
Language:
english
DOI:
10.1149/1.3360700
File:
PDF, 249 KB
english, 2010
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