Fabrication of Ordered Trench Structures with High Aspect...

Electrochemical and Solid-State Letters 2010 Vol. 13; Iss. 7

Fabrication of Ordered Trench Structures with High Aspect Ratios by Anisotropic Anode Etching of Al(100)

Fukushima, Tatsuro, Takeda, Akifumi, Nishio, Kazuyuki, Masuda, Hideki
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Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3388511
File:
PDF, 474 KB
english, 2010
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