ECS Transactions [ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] - (Invited) Integration Challenges for Copper Damascene Electroplating
Stöckgen, Uwe G., Wehner, Susanne, Heinrich, Jens, Kiesel, Axel, Liske, RomyYear:
2010
Language:
english
DOI:
10.1149/1.3390653
File:
PDF, 1.70 MB
english, 2010