![](/img/cover-not-exists.png)
ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Optimization of Silicon-Silicon Adhesive Wafer Bonding
Holl, Susan L., Korrapati, Srinivasulu, Colinge, C.Year:
2010
Language:
english
DOI:
10.1149/1.3483519
File:
PDF, 209 KB
english, 2010