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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - ALD on High Mobility Channels: Engineering the Proper Gate Stack Passivation
Sioncke, Sonja, Lin, Hang-Chun, Adelmann, Christoph, Brammertz, Guy, Delabie, A., Conard, Thierry, Franquet, A., Caymax, Matty, Meuris, Marc, Struyf, Herbert, De Gendt, S., Heyns, Marc M., FleischmannYear:
2010
Language:
english
DOI:
10.1149/1.3485237
File:
PDF, 7.65 MB
english, 2010