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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - (Invited) Cyclic Deposition/Etch Processes for the Formation of Si Raised Sources and Drains in Advanced MOSFETs
Hartmann, Jean Michel, Py, M., Morel, P. H., Ernst, T., Prévitali, B., Barnes, J.P., Vulliet, N., Cherkashin, N., Reboh, S., Hÿtch, M., Paillard, V.Year:
2010
Language:
english
DOI:
10.1149/1.3487570
File:
PDF, 3.44 MB
english, 2010