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ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Evaluation of Metallization Options for Advanced Cu Interconnects Application
Jourdan, Nicolas, Carbonell, Laureen, Heylen, Nancy, Swerts, Johan, Armini, S., Caro, A. Maestre, Demuynck, S., Croes, K., Beyer, G., Tökei, Zsolt, Elshocht, S. Van, Vancoille, E.Year:
2011
Language:
english
DOI:
10.1149/1.3567629
File:
PDF, 657 KB
english, 2011