ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Effect of pH on CMP of VOx Thin Films for RRAM
Liguo, Yin, Zhang, Kailiang, Fang, Wang, Wei, Xiaoying, Taofeng, ZhangYear:
2011
Language:
english
DOI:
10.1149/1.3567661
File:
PDF, 261 KB
english, 2011