ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Synthesis, Pore Morphology, and Dielectric Property of Mesoporous Low-k Material PSMSQ Using a Reactive High-Temperature Porogen, TEPSS
Chiu, Shih-Ya, Hsu, Hsin-Ling, Che, Mu-Lung, Leu, JihperngYear:
2011
Language:
english
DOI:
10.1149/1.3572309
File:
PDF, 482 KB
english, 2011