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ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Effects of Varying Surface Film Thickness on Particle Adhesion in Semiconductor Material-Based Systems
Smith, Katie M., Butterbaugh, Jeffery, Beaudoin, StephenYear:
2011
Language:
english
DOI:
10.1149/1.3630850
File:
PDF, 638 KB
english, 2011