ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Fabrication of High-k/Ge Stacks with High Quality GeO
Suzuki, Yuya, Oniki, Yusuke, Iwazaki, Yoshitaka, Ueno, TomoYear:
2011
Language:
english
DOI:
10.1149/1.3633017
File:
PDF, 1.84 MB
english, 2011