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ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Diffusion-Reaction Model of ALD in Nanostructured Substrates: Analytic Approximations to Dose Times as a Function of the Surface Reaction Probability
Yanguas-Gil, Angel, Elam, Jeffrey W.Year:
2011
Language:
english
DOI:
10.1149/1.3633665
File:
PDF, 329 KB
english, 2011