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ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - Contact Resistance Study in MOCVD TiN Process
Han, Jerry, Li, Bigtree, Zhang, Ji-Wei, Jiang, Jian-Yong, Lin, Paul-ChangYear:
2012
Language:
english
DOI:
10.1149/1.3694355
File:
PDF, 223 KB
english, 2012