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ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - Process Variation Improvement and Stress Analysis of Contact Module
Luoh, Tuung, Liao, Hsiang-Chou, Chen, Po-Chou, Yang, Ling-Wu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-YuanYear:
2012
Language:
english
DOI:
10.1149/1.3694381
File:
PDF, 700 KB
english, 2012