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Thermal Oxidation of Structured Silicon Dioxide
Christiansen, T. L., Hansen, O., Jensen, J. A., Thomsen, E. V.Volume:
3
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.003405jss
Date:
March, 2014
File:
PDF, 619 KB
english, 2014